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The high-performance LC-450A zirconia oxygen analyzer was developed based on Toray Engineering's long track record of excellence and experience, and enables measurement ranging from low concentrations to 100% oxygen concentration with a single device.
This analyzer is equipped with our unique, ultra-compact zirconia sensor to enable stable and highly accurate measurement over the long term, and the oxygen sensor has been specially treated to achieve unprecedented durability. This is an easy to operate, compact oxygen analyzer which is ideal for integration into semiconductor/LCD equipment and other types of equipment.
Toray zirconia oxygen analyzers determine oxygen concentration using the ion conductivity of a zirconia ceramic cell. Zirconia ceramic cells only allow oxygen ions to pass through at high temperatures. With reference gas on one side and sample gas on the other, oxygen ions move from the side with the highest concentration of oxygen to that with the lowest concentration. The movement of ions generates an EMF (Electro Motive Force) which can be measured to determine the oxygen content. This is in accordance with the Nernst equation.